育晶论坛第22期：Approach to final polishing of silicon carbide wafers based on electron beam processing

［本站讯］为树牢师生创新意识，营造浓厚学术氛围，紧跟学术前沿，把握行业动态，集成攻关大平台与晶体材料国家重点实验室共同设立“育晶论坛”系列活动。每期论坛邀请领域内杰出专家学者开展主题讲座。 一、讲座题目 Approach to final polishing of silicon carbide wafers based on electron beam processing 二、主讲人 Evgeny Gusev 三、主讲人简介 Institute: Southern Federal University, Institute of Nanotechnologies, Electronics and Equipment Engineering. Title: Associate Professor. Medal and Diploma of the Ministry of Education of the Russian Federation. Scientific interests: Micro- and nanofabrication technologies, technology of microelectromechanical systems, microelectronic sensors. Author (or co-author) of more than 150 publications and 3 monographs, 5 patents. Participant and leader of projects supported by RFBR, Federal Targeted Programmes, Ministry of Education and Science of the Russian Federation grants. Participant of applied projects in Russia. Since 2010 Associate Professor, Department of Nanotechnologies and Microsystems, Southern Federal University, Taganrog, Russia. Since 2013， Head of Plasma Nanotechnology Laboratory, Research and Education Center Nanotechnologies, Southern Federal University. Since 2019， Head of the bachelor study program "Nanoengineering" at Institute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, Taganrog, Russia. 四、主讲内容 The report is focused on surface preparation of silicon carbide substrates using electron beam processing (EBP). Wafer output characteristics are discussed in term of roughness and subsurface damage layer. Describing this approach, mechanism of electron beam processing for polishing wafers is explained. Some experience data on electron beam processing of {0001} 6H-SiC and its polishing effect are shown. Based on the obtained results, it is assumed that it is possible to replace several stages of chemical-mechanical polishing with only one EBP stage. Experimental data on synthesis of graphene-like layers on silicon carbide by EBP are presented as addition. 五、主持人 王希玮 副研究员 六、讲座时间 2023年11月15日（周三）上午10：00 七、讲座地点 山东大学中心校区半导体研发大楼第一会议室